JPH0325404Y2 - - Google Patents
Info
- Publication number
- JPH0325404Y2 JPH0325404Y2 JP15474886U JP15474886U JPH0325404Y2 JP H0325404 Y2 JPH0325404 Y2 JP H0325404Y2 JP 15474886 U JP15474886 U JP 15474886U JP 15474886 U JP15474886 U JP 15474886U JP H0325404 Y2 JPH0325404 Y2 JP H0325404Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- frame
- section
- elevating
- spin chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 213
- 230000003028 elevating effect Effects 0.000 claims description 30
- 238000007599 discharging Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 description 24
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (en]) | 1986-10-08 | 1986-10-08 | |
| US07/106,584 US4846623A (en) | 1986-10-08 | 1987-10-08 | Wafer transferring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (en]) | 1986-10-08 | 1986-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361139U JPS6361139U (en]) | 1988-04-22 |
| JPH0325404Y2 true JPH0325404Y2 (en]) | 1991-06-03 |
Family
ID=31074830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15474886U Expired JPH0325404Y2 (en]) | 1986-10-08 | 1986-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325404Y2 (en]) |
-
1986
- 1986-10-08 JP JP15474886U patent/JPH0325404Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6361139U (en]) | 1988-04-22 |
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